株式会社シリコンテクノロジー

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  2. Process
  3. Polished Wafer process

Polished Wafer process

Mirror polishment on single side, or both side.

Plate bonding

In order to polish wafer as mirror surface, wafers will be donded with seramic plate.

自動接着装置
Auto bonding tool

Mirror polishing

High flatness and high purified wafer will be produced as high quality mirror surface by CMP process.

研磨装置
Polishing